diff --git a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/storageengine/dataregion/compaction/execute/performer/impl/RepairUnsortedFileCompactionPerformer.java b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/storageengine/dataregion/compaction/execute/performer/impl/RepairUnsortedFileCompactionPerformer.java
index 962957f4f02e2..2dee987cb2c4f 100644
--- a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/storageengine/dataregion/compaction/execute/performer/impl/RepairUnsortedFileCompactionPerformer.java
+++ b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/storageengine/dataregion/compaction/execute/performer/impl/RepairUnsortedFileCompactionPerformer.java
@@ -19,6 +19,7 @@
 
 package org.apache.iotdb.db.storageengine.dataregion.compaction.execute.performer.impl;
 
+import org.apache.iotdb.commons.utils.FileUtils;
 import org.apache.iotdb.commons.utils.TestOnly;
 import org.apache.iotdb.db.storageengine.dataregion.compaction.execute.utils.CompactionUtils;
 import org.apache.iotdb.db.storageengine.dataregion.compaction.execute.utils.writer.AbstractCompactionWriter;
@@ -34,7 +35,6 @@
 import org.apache.tsfile.encrypt.EncryptParameter;
 
 import java.io.IOException;
-import java.nio.file.Files;
 import java.util.Collections;
 import java.util.List;
 
@@ -83,7 +83,7 @@ protected QueryDataSource initQueryDataSource() {
   private void prepareTargetFile() throws IOException {
     TsFileResource seqSourceFile = seqFiles.get(0);
     TsFileResource targetFile = targetFiles.get(0);
-    Files.createLink(targetFile.getTsFile().toPath(), seqSourceFile.getTsFile().toPath());
+    FileUtils.createLink(targetFile.getTsFile().toPath(), seqSourceFile.getTsFile().toPath(), true);
     ITimeIndex timeIndex = seqSourceFile.getTimeIndex();
     if (timeIndex instanceof ArrayDeviceTimeIndex) {
       targetFile.setTimeIndex(timeIndex);
@@ -91,9 +91,10 @@ private void prepareTargetFile() throws IOException {
       targetFile.setTimeIndex(CompactionUtils.buildDeviceTimeIndex(seqSourceFile));
     }
     if (seqSourceFile.anyModFileExists()) {
-      Files.createLink(
+      FileUtils.createLink(
           seqSourceFile.getCompactionModFile().getFile().toPath(),
-          seqSourceFile.getExclusiveModFile().getFile().toPath());
+          seqSourceFile.getExclusiveModFile().getFile().toPath(),
+          true);
     }
   }
 
diff --git a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/storageengine/dataregion/compaction/execute/task/InsertionCrossSpaceCompactionTask.java b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/storageengine/dataregion/compaction/execute/task/InsertionCrossSpaceCompactionTask.java
index dd8fb2b8e239b..b3f77c9214e53 100644
--- a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/storageengine/dataregion/compaction/execute/task/InsertionCrossSpaceCompactionTask.java
+++ b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/storageengine/dataregion/compaction/execute/task/InsertionCrossSpaceCompactionTask.java
@@ -19,6 +19,7 @@
 
 package org.apache.iotdb.db.storageengine.dataregion.compaction.execute.task;
 
+import org.apache.iotdb.commons.utils.FileUtils;
 import org.apache.iotdb.db.conf.IoTDBDescriptor;
 import org.apache.iotdb.db.i18n.StorageEngineMessages;
 import org.apache.iotdb.db.service.metrics.FileMetrics;
@@ -221,10 +222,11 @@ public File generateTargetFile() throws IOException {
   private void prepareTargetFiles() throws IOException {
     File sourceTsFile = unseqFileToInsert.getTsFile();
     File targetTsFile = targetFile.getTsFile();
-    Files.createLink(targetTsFile.toPath(), sourceTsFile.toPath());
-    Files.createLink(
+    FileUtils.createLink(targetTsFile.toPath(), sourceTsFile.toPath(), true);
+    FileUtils.createLink(
         new File(targetTsFile.getPath() + TsFileResource.RESOURCE_SUFFIX).toPath(),
-        new File(sourceTsFile.getPath() + TsFileResource.RESOURCE_SUFFIX).toPath());
+        new File(sourceTsFile.getPath() + TsFileResource.RESOURCE_SUFFIX).toPath(),
+        true);
 
     unseqFileToInsert.linkModFile(targetFile);
 
diff --git a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/storageengine/dataregion/modification/v1/ModificationFileV1.java b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/storageengine/dataregion/modification/v1/ModificationFileV1.java
index d17a5b50c2e39..0d73a0b27c022 100644
--- a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/storageengine/dataregion/modification/v1/ModificationFileV1.java
+++ b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/storageengine/dataregion/modification/v1/ModificationFileV1.java
@@ -19,6 +19,7 @@
 
 package org.apache.iotdb.db.storageengine.dataregion.modification.v1;
 
+import org.apache.iotdb.commons.utils.FileUtils;
 import org.apache.iotdb.db.i18n.StorageEngineMessages;
 import org.apache.iotdb.db.storageengine.dataregion.modification.v1.io.LocalTextModificationAccessor;
 import org.apache.iotdb.db.storageengine.dataregion.modification.v1.io.ModificationReader;
@@ -181,7 +182,7 @@ public ModificationFileV1 createHardlink() {
       File hardlink = new File(filePath + hardlinkSuffix);
 
       try {
-        Files.createLink(Paths.get(hardlink.getAbsolutePath()), Paths.get(filePath));
+        FileUtils.createLink(Paths.get(hardlink.getAbsolutePath()), Paths.get(filePath), true);
         return new ModificationFileV1(hardlink.getAbsolutePath());
       } catch (FileAlreadyExistsException e) {
         // retry a different name if the file is already created
diff --git a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/storageengine/dataregion/tsfile/TsFileResource.java b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/storageengine/dataregion/tsfile/TsFileResource.java
index 439286288d623..3059d64ff7f78 100644
--- a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/storageengine/dataregion/tsfile/TsFileResource.java
+++ b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/storageengine/dataregion/tsfile/TsFileResource.java
@@ -26,6 +26,7 @@
 import org.apache.iotdb.commons.path.PartialPath;
 import org.apache.iotdb.commons.pipe.datastructure.resource.PersistentResource;
 import org.apache.iotdb.commons.utils.CommonDateTimeUtils;
+import org.apache.iotdb.commons.utils.FileUtils;
 import org.apache.iotdb.commons.utils.TestOnly;
 import org.apache.iotdb.db.conf.IoTDBConfig;
 import org.apache.iotdb.db.conf.IoTDBDescriptor;
@@ -74,7 +75,6 @@
 import java.io.InputStream;
 import java.io.UncheckedIOException;
 import java.nio.ByteBuffer;
-import java.nio.file.Files;
 import java.util.ArrayList;
 import java.util.Collection;
 import java.util.Collections;
@@ -407,10 +407,11 @@ public boolean anyModFileExists() {
   }
 
   public void link(TsFileResource target) throws IOException {
-    Files.createLink(target.getTsFile().toPath(), this.getTsFile().toPath());
-    Files.createLink(
+    FileUtils.createLink(target.getTsFile().toPath(), this.getTsFile().toPath(), true);
+    FileUtils.createLink(
         new File(target.getTsFilePath() + TsFileResource.RESOURCE_SUFFIX).toPath(),
-        new File(this.getTsFilePath() + TsFileResource.RESOURCE_SUFFIX).toPath());
+        new File(this.getTsFilePath() + TsFileResource.RESOURCE_SUFFIX).toPath(),
+        true);
     linkModFile(target);
   }
 
@@ -422,8 +423,8 @@ public void linkModFile(TsFileResource target) throws IOException {
     try {
       if (sourceModFile.exists()) {
         // inherit modifications from the source file
-        Files.createLink(
-            targetModsFile.toPath(), ModificationFile.getExclusiveMods(getTsFile()).toPath());
+        FileUtils.createLink(
+            targetModsFile.toPath(), ModificationFile.getExclusiveMods(getTsFile()).toPath(), true);
       }
       // ensure that new modifications will be written into the target file
       targetModsFileObject = new ModificationFile(targetModsFile, true);
diff --git a/iotdb-core/node-commons/src/main/java/org/apache/iotdb/commons/utils/FileUtils.java b/iotdb-core/node-commons/src/main/java/org/apache/iotdb/commons/utils/FileUtils.java
index be99503a3c9ef..3661e1d91cab8 100644
--- a/iotdb-core/node-commons/src/main/java/org/apache/iotdb/commons/utils/FileUtils.java
+++ b/iotdb-core/node-commons/src/main/java/org/apache/iotdb/commons/utils/FileUtils.java
@@ -89,6 +89,23 @@ public static boolean deleteFileIfExist(File file) {
     }
   }
 
+  public static void createLink(Path link, Path existing, boolean fallBackToCopy)
+      throws IOException {
+    try {
+      Files.createLink(link, existing);
+    } catch (IOException | UnsupportedOperationException e) {
+      if (!fallBackToCopy) {
+        throw e;
+      }
+      try {
+        Files.copy(existing, link);
+      } catch (IOException copyException) {
+        copyException.addSuppressed(e);
+        throw copyException;
+      }
+    }
+  }
+
   public static void deleteFileOrDirectory(File file) {
     deleteFileOrDirectory(file, false);
   }